High frequency properties of Fe-Cr-Ta-N soft magnetic films
High frequency properties of Fe-Cr-Ta-N soft magnetic films
复制标题
DOI：
10.1063/1.119120
复制
发表时间：
1997-06-09
影响因子：
4
通讯作者：
Chen, LH
中科院分区：
文献类型：
--
作者：
Jin, S;Zhu, W;Chen, LH
研究了一种新型软磁Fe-Cr-Ta-N合金薄膜的高频磁性能。在含氮气氛中反应溅射制备了Fe-4.6% Cr-0.2% Ta-7.4% N（原子百分比）的薄膜。这些薄膜很可能是纳米晶，在未经过任何热处理的情况下，在沉积状态下表现出优异的软磁性能，例如，H-c低至1.2 Oe （95.3 A/m）和4 pi m -s（类似于20 kG）。易轴M-H环是方形的。硬轴环呈线性闭合，各向异性场H-a = 20-100 Oe （1.59-7.95 kA/m）。由于具有较高的4 π M-s和相对较高的H-a，这些软磁薄膜在GHz频率范围内具有高磁导率和低损耗，并且将不良的铁磁共振干扰抑制到2 GHz以上。(C) 1997年美国物理研究所。
High frequency magnetic properties of a new, soft magnetic Fe-Cr-Ta-N alloy film have been investigated. Thin films with a composition of Fe-4.6% Cr-0.2% Ta-7.4% N (in atomic %) were prepared by reactive sputtering in a nitrogen-containing atmosphere. The films, most likely nanocrystalline, exhibit excellent soft magnetic properties in the as-deposited condition without any post heat treatment, e.g., H-c as low as 1.2 Oe (95.3 A/m) and 4 pi M-s similar to 20 kG. The easy-axis M-H loop is square. The hard-axis loop is linear and closed, with the anisotropy field H-a = 20-100 Oe (1.59-7.95 kA/m). By virtue of their high 4 pi M-s and relatively high H-a, these soft magnetic films exhibit high permeability and low loss in the GHz frequency range with the undesirable ferromagnetic resonance interference suppressed to beyond 2 GHz. (C) 1997 American Institute of Physics.