Performance of the ATLASPix1 pixel sensor prototype in ams aH18 CMOS technology for the ATLAS ITk upgrade
Performance of the ATLASPix1 pixel sensor prototype in ams aH18 CMOS technology for the ATLAS ITk upgrade
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DOI：
10.1088/1748-0221/14/08/c08013
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发表时间：
2019-08
影响因子：
1.3
通讯作者：
M. Kiehn;A. Herkert;A. Weber;A. Schöning;A. Miucci;A. Fehr;C. Blattgerste;C. Grzesik;D. Sultan;D. Immig;D. Forshaw;D. Ferrere;D. Wiedner;E. Zaffaroni;E. Figueras;F. Ehrler;F. Lanni;G. Iacobucci;H. Augustin;H. Liu;H. Chen;I. Perić;J. Anders;J. Hammerich;J. Kröger;J. Vossebeld;K. Chen;L. Xu;L. Noehte;L. Huth;M. Vicente;M. Benoit;M. Weber;M. Prathapan;N. Berger;S. Dittmeier;S. Sevilla;S. Tang;T. Golling;W. Wu;W. Wong
中科院分区：
文献类型：
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作者：
M. Kiehn;A. Herkert;A. Weber;A. Schöning;A. Miucci;A. Fehr;C. Blattgerste;C. Grzesik;D. Sultan;D. Immig;D. Forshaw;D. Ferrere;D. Wiedner;E. Zaffaroni;E. Figueras;F. Ehrler;F. Lanni;G. Iacobucci;H. Augustin;H. Liu;H. Chen;I. Perić;J. Anders;J. Hammerich;J. Kröger;J. Vossebeld;K. Chen;L. Xu;L. Noehte;L. Huth;M. Vicente;M. Benoit;M. Weber;M. Prathapan;N. Berger;S. Dittmeier;S. Sevilla;S. Tang;T. Golling;W. Wu;W. Wong
基于商用高压CMOS工艺的单片有源像素传感器（MAPS）是一项令人兴奋的技术，被认为是ATLAS内部跟踪器升级的一个选择。利用p型衬底上的深n阱作为传感器二极管检测粒子，耗尽区延伸到硅体中。由于读出电子器件和传感器集成在同一设备上，大大降低了探测器的复杂性和材料预算。ATLASPix1像素传感器原型是在单个物理芯片上实现完整读出链的大型MAPS原型。它具有一个大的像素传感器电极，并使用ams aH18高压技术生产。实现了具有不同读出架构、触发和非触发以及像素设计的三个像素矩阵。我们展示了其中一种像素矩阵变体在辐照至1015 1MeV meq/cm2时的性能。
Monolithic active pixel sensors (MAPS) based on commercial high-voltage CMOS processes are an exciting technology that is considered as an option for the ATLAS Inner Tracker upgrade. Particles are detected using deep n-wells on a p-type substrate as sensor diodes with the depleted region extending into the silicon bulk. With readout electronics and sensor integrated on the same device, the detector complexity and the material budget are greatly reduced. The ATLASPix1 pixel sensor prototype is a large-scale MAPS prototype that implements the full readout chain on a single physical chip. It features a large in-pixel sensor electrode and is produced using the ams aH18 high voltage technology. Three pixel matrices with different readout architectures, triggered and untriggered, and pixel designs are implemented. We show the performance of one of the pixel matrix variants for samples irradiated up to 1015 1MeV meq/cm2.