In situ ordering of FePt thin films with face-centered-tetragonal (001) texture on Cr100−xRux underlayer at low substrate temperature
In situ ordering of FePt thin films with face-centered-tetragonal (001) texture on Cr100−xRux underlayer at low substrate temperature
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DOI：
10.1063/1.1476706
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发表时间：
2002-04
影响因子：
4
通讯作者：
Yingfan Xu;Jingsheng Chen;Jianping Wang
中科院分区：
文献类型：
--
作者：
Yingfan Xu;Jingsheng Chen;Jianping Wang
采用磁控溅射法在Cr 100 −xRux衬底上原位制备了具有面心四方（fct）-（001）织构的FePt薄膜。研究了Cr衬底中Ru含量和衬底温度对FePt织构的影响。在Cr底层中添加Ru导致在较低的衬底温度（350 °C）下形成具有垂直于膜平面的c轴取向的FePt有序相。用Cr 91 Ru 9作底层的薄膜获得了良好的垂直磁性能。在FePt层和CrRu底层之间引入了一层薄的Pt中间层，发现它可以有效地阻止Cr从CrRu底层扩散到FePt层中，并产生更好的FePt fct-（001）织构和改善的磁性能。
In situ ordered FePt thin films with face-centered-tetragonal (fct)-(001) texture have been prepared by magnetron sputtering the FePt layer onto the Cr100−xRux underlayer at relatively low temperature. The dependence of FePt texture on the Ru content in the Cr underlayer and the substrate temperature is investigated. Addition of Ru in Cr underlayer results in the formation of the FePt ordered phase in a lower substrate temperature (350 °C) with c-axis orientation perpendicular to the film plane. Good perpendicular magnetic properties are obtained in films with Cr91Ru9 underlayer. A thin Pt intermediate layer is introduced between the FePt layer and the CrRu underlayer, which is found to effectively resist the Cr diffusion from the CrRu underlayer into the FePt layer and results in better FePt fct-(001) texture and improved magnetic properties.