Production of Highly Lubricious Ti-Based Ceramic Films for Reducing Friction between Web and Transiting Roller
Production of Highly Lubricious Ti-Based Ceramic Films for Reducing Friction between Web and Transiting Roller
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DOI：
10.7567/jjap.52.05da03
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发表时间：
2013-05
影响因子：
1.5
通讯作者：
M. Kohzaki;Ryohei Makita
中科院分区：
文献类型：
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作者：
M. Kohzaki;Ryohei Makita
已经开发了用于生产柔性和印刷电子产品的卷筒纸转移处理机。为了建立稳定的卷对卷输送而没有幅材缺陷，幅材与过渡辊之间的摩擦系数应控制在较低的值。为了改善柔性印刷电子制造工艺中过渡辊的摩擦性能，采用直流磁控溅射法制备了氮化钛-二硫化钼（TiN-MoS 2）复合薄膜。TiN-MoS 2薄膜的硬度在22%MoS2时约为17 GPa。含22%MoS2的复合膜在室温下表现出约0.1的低摩擦系数，这几乎等于类金刚石碳（DLC）膜。此外，在摩擦测试之后，在膜上仅检测到小的磨损。Ti中间层的形成提高了复合膜的结合强度，并进一步降低了磨损。
Web transiting process machines have been developed for producing flexible and printed electronics. For establishing a stable roll-to-roll transportation without web defects, the friction coefficient between the web and the transiting roller should be controlled at a low value. We produced the titanium nitride–molybdenum disulfide (TiN–MoS2) composite films by DC magnetron sputtering for improving the frictional characteristics of the transiting roller used in manufacturing process of flexible and printed electronics. The hardness of the TiN–MoS2 films was about 17 GPa at 22% MoS2. The composite films containing 22% MoS2 showed a low friction coefficient of approximately 0.1 at room temperature, which was almost equal to that of diamond-like carbon (DLC) films. In addition, only a small wear was detected on the films after the friction test. The adhesive strength of the composite films was improved by forming the Ti interlayer, and the further reduction of wear was observed.