Homogeneous and elongation-free 3D microfabrication by a femtosecond laser pulse and hologram
Homogeneous and elongation-free 3D microfabrication by a femtosecond laser pulse and hologram
复制标题
DOI：
10.1063/1.4705286
复制
发表时间：
2012-04
影响因子：
3.2
通讯作者：
M. Yamaji;H. Kawashima;J. Suzuki;S. Tanaka;M. Shimizu;K. Hirao;Y. Shimotsuma;K. Miura
中科院分区：
文献类型：
--
作者：
M. Yamaji;H. Kawashima;J. Suzuki;S. Tanaka;M. Shimizu;K. Hirao;Y. Shimotsuma;K. Miura
发展了一种新的三维微加工方法，该方法仅使用单个飞秒激光脉冲和全息图。对于透明材料内部的微细加工，所制造的结构的光轴伸长是迄今为止限制设计灵活性的主要问题，特别是对于沿光轴的沿着。通过控制光强分布轮廓和使用适当的全息焦距，解决了这个问题，实现了均匀和无拉伸的3D微加工。
A new 3D microfabrication method has been developed, which uses only a single femtosecond laser pulse and a hologram. For the microfabrication inside transparent materials, the optical axial elongation of the fabricated structure is a major problem that has thus far limited design flexibility, especially for the direction along the optical axis. By controlling the light intensity distribution profile and using the adequate focal length of the hologram, this problem was solved and homogeneous and elongation-free 3D microfabrication was achieved.