Quantitative voltage measurement of high-frequency internal integrated circuit signals by scanning probe microscopy
Quantitative voltage measurement of high-frequency internal integrated circuit signals by scanning probe microscopy
复制标题
利用扫描探针显微镜对高频内部集成电路信号进行定量电压测量
DOI：
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发表时间：
2002
期刊：
影响因子：
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通讯作者：
D. Thomson
中科院分区：
文献类型：
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作者：
Z. Weng;C. J. Falkingham;G. Bridges;D. Thomson
本文介绍了一种扫描探针显微镜技术定量高速电压波形测量内运行的集成电路。内部信号是通过检测非接触式微机械探针悬臂梁上的局部静电力来确定的，该悬臂梁紧密地位于电路测试点上方。采用基于幅度调制的下变频来测量重复的高频信号，该高频信号可以具有比探头的机械响应大得多的带宽。力归零技术用于获得精确的绝对电压，而无需复杂的校准或精确的探头定位，并能够直接测量钝化电路。本文介绍了一种消除直流失调误差的方法，如由于材料功函数的差异而引起的直流失调误差。介绍了宽带分布式放大器钝化互连线上信号的测量。该仪器在2.5 V动态范围内的电压精度<30 mV。
This article describes a scanning probe microscopy technique for quantitative high-speed voltage wave form measurement inside an operating integrated circuit. Internal signals are determined by sensing the local electrostatic force on a noncontacting micromachined probe cantilever that is closely positioned above the circuit test point. Amplitude modulation based downconversion is employed to measure repetitive high-frequency signals which can have a bandwidth much greater than the mechanical response of the probe. A force-nulling technique is used to obtain accurate absolute voltages without the need for complex calibration or precise probe positioning, and enables direct measurement of passivated circuits. A method of eliminating dc offset errors, such as that due to material work function differences, is described. Measurement of signals on the passivated interconnects of a wideband distributed amplifier is presented. The instrument demonstrates a voltage accuracy of <30 mV over a dynamic range of 2.5 V.