In-line pressure monitoring for microfluidic devices using a deformable diffraction grating
In-line pressure monitoring for microfluidic devices using a deformable diffraction grating
复制标题
使用可变形衍射光栅对微流体装置进行在线压力监测
DOI：
10.1109/memsys.2001.906508
复制
发表时间：
2001
期刊：
影响因子：
--
通讯作者：
R. Maeda
中科院分区：
文献类型：
--
作者：
K. Hosokawa;R. Maeda
本文提出了一种利用可变形衍射光栅监测微流控器件中局部压力的新方法。使用复制模塑技术，用透明硅橡胶-聚二甲基硅氧烷（PDMS）制造测试装置。通过PDMS芯片和玻璃板之间的共形接触限定了2 mm/spl倍/2 mm面积的衍射光栅和200 /spl μ/m宽和20 /spl μ/m深的微通道。光栅由5 /spl mu/m宽、2 /spl mu/m深的矩形槽组成，以10 /spl mu/m的周期排列，并且它与微通道的接入端口连接。给出了该器件对0 ~-80 kPa内压的光学响应，并与理论预测进行了比较。实验结果表明，该装置可测量0 ~ 0.3cc/min的空气流量，其主要优点是制造简单，设计灵活。该方法不仅适用于微流控器件的流动表征，而且为新型光纤压力传感器和压力驱动光调制器的研制提供了可能。
In this paper, a novel optical method for monitoring of local pressure in a microfluidic device using a deformable diffraction grating is presented. A test device was fabricated with transparent silicone elastomer-polydimethylsiloxane (PDMS)-using the replica molding technique. A diffraction grating of 2 mm/spl times/2 mm area and a microchannel of 200 /spl mu/m width and 20 /spl mu/m depth are defined by the conformal contact between a PDMS chip and a glass plate. The grating consists of 5 /spl mu/m wide, 2 /spl mu/m deep rectangular grooves arrayed with period of 10 /spl mu/m, and it is connected to access ports with the microchannel. Optical response of the device to internal pressure ranging from 0 to -80 kPa is presented and compared with theoretical prediction. It is also demonstrated that the test device can be used for measurement of air flow rate ranging form 0 to 0.3 cc/min. The major advantages of this method are simple fabrication and flexible design. This method is not only desirable for flow characterization of microfluidic devices, but also opens up the possibility of new types of fiber-optic pressure sensors and pressure-driven optical modulators.