Investigation of Affecting Factors on the Hardness of Fluorine-Containing Amorphous Carbon Film Coated by Pulsed-Plasma Ablation
Investigation of Affecting Factors on the Hardness of Fluorine-Containing Amorphous Carbon Film Coated by Pulsed-Plasma Ablation
复制标题
脉冲等离子体烧蚀涂覆含氟非晶碳膜硬度影响因素的研究
DOI：
10.1109/tps.2012.2195033
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发表时间：
2012
影响因子：
1.5
通讯作者：
Shingo Kawara
中科院分区：
文献类型：
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作者：
Hiroyuki Kousaka;Yasuyuki Takaoka;Noritsugu Umehara;森清友亮，春日勇人，風間清子，坂本信，小林公一，田邊裕治;Masanori Ozaki;田中豊,横田眞一,枝村一弥;笹原亮;三宮大輝，上坂裕之，野老山貴行，梅原徳次;小林紀穂,竹村研治郎,横田眞一,枝村一弥;Le Tran Uyen Tu;高橋匠，小林公一，坂本信，田邊裕治;堀 哲郎;渡辺恭司，プラムディタ ジョナス，田邊裕治;岩井善郎;米谷 慎;野上真;佐藤政哉,金俊完,横田眞一,枝村一弥;野上真;小森元博，田邊裕治，プラムディタ ジョナス;Shingo Kawara
研究了脉冲等离子体烧蚀聚四氟乙烯(PTFE)制备的含氟类金刚石(F-DLC)薄膜的硬度控制。在涂布过程中，一个衬底设置在来自PTFE块的等离子体加速方向的下游位置(前端位置)，而另一个衬底设置在垂直于来自PTFE的等离子体加速方向的侧面位置。仅在前衬底观察到典型的类钻石碳的拉曼光谱，包括sp2碳的D峰和G峰；另一方面，从侧面衬底看不到这样的光谱。F-DLC的前位硬度为5.7 Gpa，侧位为0.4 Gpa。这些结果表明，加速等离子体对前衬底的轰击对提高薄膜的硬度起到了至关重要的作用。为了进一步提高含PPA的F-DLC膜的硬度，在镀膜过程中尝试在镀膜室中加入水。在底压小于0.4×10~(-4)托的情况下，当腔压为5×10~(-4)托时，水的加入量可使F-DLC的硬度提高到10.4 GPA。
Hardness control of fluorine-containing diamondlike carbon (F-DLC) film deposited by pulsed-plasma ablation (PPA) of polytetrafluoroethylene (PTFE) was investigated. During coating, one substrate was set at a downstream position (front position) in the direction of plasma acceleration from a PTFE block, whereas another substrate was set at a side position in the direction perpendicular to the plasma acceleration from the PTFE. A typical Raman spectrum of diamondlike carbon, including D and G peaks due to sp2carbons, was observed only from the front substrate; on the other hand, such a spectrum was not clearly seen from the side substrate. The hardness of F-DLC was 5.7 GPa at the front position, whereas it was 0.4 GPa at the side position. These results indicated that the bombardment of accelerated plasma to the front substrate played an essential role to increase the film hardness. In order to further increase the hardness of F-DLC film with PPA, H2O addition to the chamber during coating was attempted. The hardness of F-DLC was increased up to 10.4 GPa at a chamber pressure of 5 10-4torr obtained by H2O addition to the base pressure less than 0.4 10-4torr.