Electromechanical resonators from graphene sheets
Electromechanical resonators from graphene sheets
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DOI：
10.1126/science.1136836
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发表时间：
2007-01-26
期刊：
影响因子：
56.9
通讯作者：
McEuen, Paul L.
中科院分区：
文献类型：
--
作者：
Bunch, J. Scott;van der Zande, Arend M.;McEuen, Paul L.
纳米机电系统由单层和多层石墨烯片通过在氧化硅中的沟槽上从石墨机械剥离薄片来制造。具有兆赫范围内的基本谐振频率的振动被光学地或电学地致动，并且通过干涉测量法被光学地检测。我们证明了室温下的电荷灵敏度低至8 × 10（-4）电子每根赫兹。最薄的谐振器由单个悬浮的原子层组成，代表了二维纳米机电系统的极限。
Nanoelectromechanical systems were fabricated from single- and multilayer graphene sheets by mechanically exfoliating thin sheets from graphite over trenches in silicon oxide. Vibrations with fundamental resonant frequencies in the megahertz range are actuated either optically or electrically and detected optically by interferometry. We demonstrate room-temperature charge sensitivities down to 8 x 10(-4) electrons per root hertz. The thinnest resonator consists of a single suspended layer of atoms and represents the ultimate limit of two-dimensional nanoelectromechanical systems.