Preparation and performances of Ni-Fe/CrNx dual layer coatings for ferritic stainless steel interconnects
Preparation and performances of Ni-Fe/CrNx dual layer coatings for ferritic stainless steel interconnects
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DOI：
10.1016/j.rinp.2019.01.061
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发表时间：
2019-03
影响因子：
5.3
通讯作者：
Pengfei You;Xuqiang Zhang;Xi Yang;Huixuan Zhang;Liang Yang;Chengkui Zeng
中科院分区：
文献类型：
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作者：
Pengfei You;Xuqiang Zhang;Xi Yang;Huixuan Zhang;Liang Yang;Chengkui Zeng
采用复合方法研制了用于金属互连的双层涂层CrNx和Ni-Fe合金。采用多弧离子镀技术在铁素体不锈钢表面沉积CrNx涂层，然后在CrNx涂层钢上电镀Ni-Fe合金层。在800 °C空气中氧化5 h后，在CrNx/衬底上形成了由NiFe2O4、Cr2O3NiFeCrx合金和CrNx组成的由外到内的多层膜，涂层厚度为1.6 μm的Ni-32 at%Fe合金。进一步的氧化导致了CrNx层的分解，但即使在氧化1000 h后，在膜/基界面附近也没有观察到气孔，CrNx层在分解前和分解后都有效地阻止了元素在涂层和基材之间的相互扩散。Ni-Fe/CrNx双层涂层的使用降低了Cr2O3膜的生长速度，从而降低了膜的比电阻(ASR)。讨论了Ni-Fe/CrNx涂层的氧化行为和CrNx阻挡层的影响机理。
Dual layer coatings CrNxand Ni-Fe alloy have been developed for metallic interconnects application by a combined approach. The CrNxlayer was deposited on ferritic stainless steel using multi-arc ion plating, and the Ni-Fe alloy coating was electroplated on the CrNxcoated steel subsequently. After oxidation at 800 °C in air for 5 h, a multi-layer scale composed of NiFe2O4, Cr2O3, Ni-Fe-Cr alloy and CrNxfrom outside to inside was formed on the CrNx/substrate with a 1.6 μm thick Ni-32 at%Fe alloy coating. Further oxidation led to the decomposition of the CrNxlayer, but no pores could be observed near the scale/substrate interface even after an oxidation of 1000 h. The CrNxlayer acted as an effective barrier against the mutual diffusion of elements between the coating and the substrate either before or after decomposition. The employment of the Ni-Fe/CrNxdual layer coating decreased the growth rate of the Cr2O3scale and thus a lower scale area specific resistance (ASR). The oxidation behavior of the Ni-Fe/CrNxcoated substrate and the influence mechanism of the CrNxbarrier layer were discussed.