Continuous nanoparticle generation and assembly by atmospheric pressure arc discharge
Continuous nanoparticle generation and assembly by atmospheric pressure arc discharge
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DOI：
10.1063/1.3197646
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发表时间：
2009-09-14
影响因子：
4
通讯作者：
Jacobs, Heiko O.
中科院分区：
文献类型：
--
作者：
Cole, Jesse J.;Lin, En-Chiang;Jacobs, Heiko O.
这封信描述了一种纳米粒子生成和沉积系统，它结合了高温等离子体和室温气溶胶的各个方面。该工艺在大气压下工作，并通过直流电弧放电等离子体中的阴极侵蚀产生Au或ZnO纳米颗粒。粒子被电弧带正电，形成室温气溶胶。从气溶胶中，纳米粒子通过图案抗蚀剂的开口聚集在导电样品表面上，通过电动力纳米透镜提高了分辨率。我们报告说，该系统的持续操作导致纳米颗粒的漏斗沉积到定位良好的三维纳米结构中。(C) 2009年美国物理研究所。(doi: 10.1063/1.3197646)
This letter describes a nanoparticle generation and deposition system which combines aspects of high temperature plasmas with room temperature aerosols. The process works at atmospheric pressure and produces nanoparticles of Au or ZnO through cathode erosion inside a dc arc discharge plasma. The particles are positively charged by the arc and form a room temperature aerosol. From the aerosol, nanoparticles assemble on conductive sample surfaces through openings in patterned resist with resolution enhanced by electrodynamic nanolenses. We report that continued operation of the system results in funneled deposition of nanoparticles into well positioned three dimensional nanostructures. (C) 2009 American Institute of Physics. [doi: 10.1063/1.3197646]