Subsurface damage distribution characterization of ground surfaces using Abbott-Firestone curves.
Subsurface damage distribution characterization of ground surfaces using Abbott-Firestone curves.
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DOI：
10.1364/oe.20.013551
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发表时间：
2012-06
期刊：
影响因子：
3.8
通讯作者：
R. Laheurte;P. Darnis;N. Darbois;O. Cahuc;J. Néauport
中科院分区：
文献类型：
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作者：
R. Laheurte;P. Darnis;N. Darbois;O. Cahuc;J. Néauport
磨削过程引起的亚表面损伤的测量是高激光损伤熔融石英光学元件制造工艺发展的重要内容。大多数SSD测量方法只能访问峰值到峰值的值。我们在此报告了使用abbot - firestone曲线来深入了解光学材料内部SSD分布的好处。我们在各种金刚石砂轮磨削熔融二氧化硅衬底上证明，这种方法是对经典SSD峰对峰测量的补充，并为优化磨削过程提供有用的信息。
Measurement of subsurface damage (SSD) induced by grinding process is of major interest in the development of high laser damage fused silica optical components manufacturing processes. Most SSD measurements methods give only access to the peak to peak value. We herein report on the benefit of using Abbott-Firestone curves to get an insight of the SSD distribution inside the optical material. We evidence on various diamond wheel ground fused silica substrates that such an approach is complementary to a classical SSD peak to peak measurement and bring useful information to optimize a grinding process.