Spurious mode suppression in UHF micromechanical extensional wine-glass ring resonators
Spurious mode suppression in UHF micromechanical extensional wine-glass ring resonators
复制标题
UHF 微机械延伸酒杯环谐振器中的杂散模式抑制
DOI：
10.1109/memsys.2005.1453906
复制
发表时间：
2005
期刊：
影响因子：
--
通讯作者：
C. Nguyen
中科院分区：
文献类型：
--
作者：
Yuan Xie;Sheng;Yu;Z. Ren;C. Nguyen
一种几何特定的激励配置被用来抑制独立微机械拉伸酒杯环（“外WGR”）谐振器中心频率周围的所有不希望的杂散模式，如Y. Xie等人（2003）所述，该谐振器的频率高达1.47-GHz， Q's > 2000。使用该技术，通常在415-MHz外WGR的谐振附近观察到的406.7,418和419 MHz的杂散模式已被去除，谐振周围至少50%带宽区域内的所有杂散模式也已被去除。在去除不需要的模式时，该技术解决了环型（与J. Wang等人（2004）的圆盘型相反）GHz谐振器中最麻烦的问题之一，并为它们在微机械振荡器和滤波器电路中的应用铺平了道路，这些电路将用于未来基于c.t.c的无线收发器。阮(2004)。
A geometry-specific excitation configuration has been used to suppress all undesired spurious modes around the center frequencies of stand-alone micromechanical extensional wine-glass ring ("ext. WGR") resonators, previously demonstrated at frequencies up to 1.47-GHz with Q's > 2,000 as stated in Y. Xie et al. (2003). Using this technique, spurious modes at 406.7, 418, and 419 MHz, normally observed near the resonance of a 415-MHz ext. WGR, have been removed, as have all spurious modes within at least a 50% bandwidth region around the resonance. In removing unwanted modes, this technique solves one of the most encumbering issues with ring-type (as opposed to disk-type in J. Wang et al. (2004)) GHz resonators, and paves the way for their use in the micromechanical oscillator and filter circuits targeted for future wireless transceivers based on C. T.-C. Nguyen (2004).