Electrode size dependence of piezoelectric response of lead zirconate titanate thin films measured by double beam laser interferometry
Electrode size dependence of piezoelectric response of lead zirconate titanate thin films measured by double beam laser interferometry
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DOI：
10.1063/1.4821948
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发表时间：
2013-09-23
影响因子：
4
通讯作者：
Tiedke, S.
中科院分区：
文献类型：
--
作者：
Sivaramakrishnan, S.;Mardilovich, P.;Tiedke, S.
采用双光束激光干涉测量和有限元模拟方法研究了锆钛酸铅（PZT）薄膜有效大信号压电响应系数d（33，f）与电极尺寸的关系。实验观察到的电极尺寸的依赖性示出从基板的贡献。本征PZT对d（33，f）的贡献与电极尺寸无关，并且等于假定刚性衬底导出的理论值。基板的贡献是强烈依赖于相对于基板厚度的电极的相对大小。对于大于基板厚度的电极尺寸，基板贡献为正，而对于小于基板厚度的电极尺寸，基板贡献为负。在硅衬底的情况下，如果电极尺寸等于衬底厚度，则衬底贡献为零，并且d（33，f）的测量值等于刚性衬底假设下的理论值。(C)2013 AIP Publishing LLC.
The electrode size dependence of the effective large signal piezoelectric response coefficient (d(33,f)) of lead zirconate titanate (PZT) thin films is investigated by using double beam laser interferometer measurements and finite element modeling. The experimentally observed electrode size dependence is shown to arise from a contribution from the substrate. The intrinsic PZT contribution to d(33,f) is independent of electrode size and is equal to the theoretical value derived assuming a rigid substrate. The substrate contribution is strongly dependent on the relative size of the electrode with respect to the substrate thickness. For electrode sizes larger than the substrate thickness, the substrate contribution is positive and for electrode sizes smaller than the substrate thickness, the substrate contribution is negative. In the case of silicon substrates, if the electrode size is equal to the substrate thickness, the substrate contribution vanishes, and the measured value of d(33,f) is equal to the theoretical value under the rigid substrate assumption. (C) 2013 AIP Publishing LLC.