The Atmospheric Scanning Electron Microscope with open sample space observes dynamic phenomena in liquid or gas
The Atmospheric Scanning Electron Microscope with open sample space observes dynamic phenomena in liquid or gas
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DOI：
10.1016/j.ultramic.2011.08.001
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发表时间：
2011-12-01
期刊：
影响因子：
2.2
通讯作者：
Sato, Chikara
中科院分区：
文献类型：
--
作者：
Suga, Mitsuo;Nishiyama, Hidetoshi;Sato, Chikara
尽管传统电子显微镜 (EM) 要求样品处于真空中，但大多数化学和物理反应发生在液体或气体中。大气扫描电子显微镜（ASEM）可以实时观察大气压下液体或气体的动态现象。由 100 nm 厚的耐压氮化硅 (SiN) 薄膜制成的电子透过窗设置在开放式 ASEM 样品盘的底部，允许电子束从样品下方投射。位于下方的探测器捕获反向散射电子。使用 ASEM，我们观察了辐射引起的颗粒自组织过程，以及伴随体积变化的现象，包括蒸发引起的结晶。使用电化学 ASEM 皿，我们观察到阴极上的树状电化学沉积。在硝酸银溶液中，我们观察到阴极附近有银沉积，形成偶然的内部空隙。加热的 ASEM 皿可以观察熔化和凝固焊料的对比图案。最后，为了证明其在工业过程监测和控制方面的适用性，银浆和焊膏在高通量下进行了检查。高分辨率、成像速度、灵活性、适应性和易用性方便了以前难以成像的现象的观察，并使ASEM适用于各个领域。 (C) 2011 Elsevier B.V. 保留所有权利。
Although conventional electron microscopy (EM) requires samples to be in vacuum, most chemical and physical reactions occur in liquid or gas. The Atmospheric Scanning Electron Microscope (ASEM) can observe dynamic phenomena in liquid or gas under atmospheric pressure in real time. An electron-permeable window made of pressure-resistant 100 nm-thick silicon nitride (SiN) film, set into the bottom of the open ASEM sample dish, allows an electron beam to be projected from underneath the sample. A detector positioned below captures backscattered electrons. Using the ASEM, we observed the radiation-induced self-organization process of particles, as well as phenomena accompanying volume change, including evaporation-induced crystallization. Using the electrochemical ASEM dish, we observed tree-like electrochemical depositions on the cathode. In silver nitrate solution, we observed silver depositions near the cathode forming incidental internal voids. The heated ASEM dish allowed observation of patterns of contrast in melting and solidifying solder. Finally, to demonstrate its applicability for monitoring and control of industrial processes, silver paste and solder paste were examined at high throughput. High resolution, imaging speed, flexibility, adaptability, and ease of use facilitate the observation of previously difficult-to-image phenomena, and make the ASEM applicable to various fields. (C) 2011 Elsevier B.V. All rights reserved.