Quantitative Stereovision in a Scanning Electron Microscope
Quantitative Stereovision in a Scanning Electron Microscope
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DOI：
10.1007/s11340-010-9378-7
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发表时间：
2011
影响因子：
2.4
通讯作者：
Tao Zhu;Michael A. Sutton;N. Li;J. Orteu;N. Cornille;Xiaodong Li;Anthony P. Reynolds
中科院分区：
文献类型：
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作者：
Tao Zhu;Michael A. Sutton;N. Li;J. Orteu;N. Cornille;Xiaodong Li;Anthony P. Reynolds
精确的，三维全场测量在微米级的兴趣在广泛的应用，包括促进机械实验在减少长度尺度和准确的标本表面的轮廓。扫描电子显微镜系统（SEM）是用于获取用于立体重建的高放大率图像的天然平台。在这项工作中，准确的三维度量重建和变形测量使用单列SEM成像系统的集成方法进行了描述。在这些研究中，试样台旋转，以获得立体视图的试样，因为它经历机械或热负荷。在300×下的模拟和初步实验研究表明：（a）可以使用非参数失真模型从图像中去除空间变化的图像失真，（B）可以使用平面物体和网格在各种取向上的失真校正图像来可靠地校准系统，以及（c）测量阶段的样本旋转可变性可以控制，使基线应变误差在±150 µε范围内。使用经校准的SEM视图进行的基准刚体运动实验表明，重建对象中的所有应变分量的平均值约为O（10−4），并且具有标准偏差为300微应变的随机空间分布。
Accurate, 3D full-field measurements at the micron-level are of interest in a wide range of applications, including both facilitation of mechanical experiments at reduced length scales and accurate profiling of specimen surfaces. Scanning electron microscope systems (SEMs) are a natural platform for acquiring high magnification images for stereo-reconstruction. In this work, an integrated methodology for accurate three-dimensional metric reconstruction and deformation measurements using single column SEM imaging systems is described. In these studies, the specimen stage is rotated in order to obtain stereo views of the specimen as it undergoes mechanical or thermal loading. Simulations and preliminary experimental studies at 300× demonstrate that (a) spatially-varying image distortions can be removed from images using a non-parametric distortion model, (b) the system can be reliably calibrated using distortion-corrected images of a planar object and grid at various orientations and (c) specimen rotation variability during the measurement phase can be controlled so that baseline strain errors are within the range of ±150 µε. Benchmark rigid body motion experiments using calibrated SEM views demonstrate that all components of strain in the reconstructed object have a mean value around O(10−4) and a random spatial distribution with standard deviation ≈ 300 micro-strain.