ADVANCES IN HIGH-Q PIEZOELECTRIC RESONATOR MATERIALS AND DEVICES
ADVANCES IN HIGH-Q PIEZOELECTRIC RESONATOR MATERIALS AND DEVICES
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DOI：
10.1109/58.330264
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发表时间：
1994-11-01
影响因子：
3.6
通讯作者：
GUALTIERI, JG
中科院分区：
文献类型：
--
作者：
BALLATO, A;GUALTIERI, JG
为了比较压电材料和器件，采用了固有参数，即对于特定模式m的运动时间常数τ 1（m）=（ω（m）Q（m））-1。 τ 1（m）的使用是根据弹性柔度/刚度中的声学损失的调节以及作为粘度矩阵元素的材料系数的建立。 基于从晶体谐振器的等效电路表示导出的RC时间常数、声衰减、对数衰减和粘性或阻尼，给出了τ 1的替代和完全等效的定义。 对于石英器件，讨论了τ 1的变化：对于任何简单的厚度模式，对于旋转Y切割的Y 'X剪切模式，以及对于AT切割的直径厚度比。 其他因素，如安装损耗和晶体不均匀性（位错，缺陷的位置在谐振器中，和杂质迁移振动应力下）所造成的损失被简要地考虑与石英器件作为模型。 综述了一些新的压电材料/材料常数/器件，并对它们的运动时间常数进行了比较。 一个物理参数，组成的声速，压电耦合，和τ 1被确定，这有助于了解板谐振器的最大频率限制。
In order to compare piezoelectric materials and devices, an intrinsic parameter, the motional time constant tau1(m) = (omega(m)Q(m))-1 for a particular mode m is employed. The use of tau1(m) follows from the accommodation of acoustic loss in the elastic compliance/stiffness and the establishment of material coefficients that are elements of viscosity matrices. Alternative and fully equivalent definitions of tau1 are given based on the RC time constant derived from the equivalent circuit representation of a crystal resonator, acoustic attenuation, logarithmic decrement, and viscosity or damping. For quartz devices, the variation of tau1 : for any simple thickness mode, for the Y'X shear mode for rotated Y-cuts, and with diameter-thickness ratio for AT-cuts is discussed. Other factors such as mounting loss and loss caused by crystal inhomogeneities (dislocations, defect positions in the resonator, and impurity migration under vibrational stress) are briefly considered with quartz devices as the model. Some new piezoelectric materials/material constants/devices are reviewed and their motional time constants are compared. A physical parameter, composed of acoustic velocity, piezoelectric coupling, and tau1 is identified which aids in understanding the maximum frequency limitations of plate resonators.