Post-fabrication trimming of photonic crystal nanobeam cavities by electron beam irradiation
Post-fabrication trimming of photonic crystal nanobeam cavities by electron beam irradiation
复制标题
通过电子束照射对光子晶体纳米束腔进行后制造修整
DOI：
10.1364/oe.26.015908
复制
发表时间：
2018-06-11
期刊：
影响因子：
3.8
通讯作者：
Shi, Yaocheng
中科院分区：
文献类型：
--
作者：
Han, Shoubao;Shi, Yaocheng
我们证明光子晶体（PhC）纳米束腔的谐振波长可以通过电子束照射在制造后单独调整。通过测量修整前后腔体的透射光谱，发现谐振波长偏移与扫描时间和加速电压成正比。此外，通过扫描电场高度局域化的区域可以实现更大的谐振波长偏移。测量结果表明，谐振波长差可以从5.5 nm（微调前）减小到0.4 nm（微调后），同时可以保持腔体的品质因数。 (c) 2018 年美国光学协会根据 OSA 开放获取出版协议的条款
We demonstrate that resonant wavelength of photonic crystal (PhC) nanobeam cavities can be individually post-fabrication tuned by electron beam irradiation. By measuring the transmission spectrum of the cavities before and after trimming, it is shown that resonant wavelength shifts are proportional to the scanning time and the acceleration voltage. Furthermore, larger resonant wavelength shifts can be achieved by scanning the region where the electric field is highly localized. The measurement results show that the resonant wavelength difference can be reduced from 5.5 nm (before trimming) to 0.4 nm (after trimming), while the quality factor of the cavities can be maintained. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement