A Super-Precise CTE Evaluation Method for Ultra-Low-Expansion Glasses Using the LFB Ultrasonic Material Characterization System
A Super-Precise CTE Evaluation Method for Ultra-Low-Expansion Glasses Using the LFB Ultrasonic Material Characterization System
复制标题
使用 LFB 超声波材料表征系统的超精密超低膨胀玻璃 CTE 评估方法
DOI：
10.1143/jjap.44.4374
复制
发表时间：
2005
影响因子：
1.5
通讯作者：
T. Maruyama
中科院分区：
文献类型：
--
作者：
J. Kushibiki;M. Arakawa;Y. Ohashi;Kouji Suzuki;T. Maruyama
利用线聚焦超声材料表征系统（LFB-UMC），提出了一种用于未来极紫外光刻（EUVL）系统的超低膨胀玻璃热膨胀系数（CTE）的超精密测量方法。对两种商业玻璃，TiO 2-SiO2玻璃（C-7971）和Li 2 O-Al 2 O3-SiO2玻璃陶瓷（Zerodur）进行了评价。对于C-7971试件，漏声表面波（LSAW）测量CTE的灵敏度和分辨率分别为4.40（ppb/K）/（m/s）和±0.77 ppb/K（±2σ）。LSAW速度差异所造成的不同的TiO 2浓度和分布或条纹在每个标本成功地检测和评估。对于Zerodur试样，LSAW速度的差异与化学成分和结晶条件之间观察到不同的锭和试样。这种超声波方法有望成为一种非常有用和有效的CTE评估技术，并有助于改进和开发EUVL级玻璃材料。
A super-precise method of evaluating the coefficient of thermal expansion (CTE) of ultra-low-expansion glasses for future extreme ultra-violet lithography (EUVL) systems was developed using the line-focus-beam ultrasonic material characterization (LFB-UMC) system. Evaluation was demonstrated for two commercial glasses, TiO2-SiO2 glass (C-7971) and Li2O-Al2O3-SiO2 glass ceramic (Zerodur). For the C-7971 specimens, the sensitivity and resolution in the velocity measurement of leaky surface acoustic waves (LSAWs) for the CTE were estimated to be 4.40 (ppb/K)/(m/s) and ±0.77 ppb/K for ±2σ (σ: standard deviation). LSAW velocity differences caused by different TiO2 concentrations and distributions or striae in each specimen were successfully detected and evaluated. For the Zerodur specimens, LSAW velocity differences associated with the chemical compositions and crystallization conditions were observed among different ingots and specimens. This ultrasonic method is expected to be an extremely useful and effective CTE evaluation technology and to contribute to improving and developing EUVL-grade glass materials.