Enhanced sensitivity in a butterfly gyroscope with a hexagonal oblique beam
Enhanced sensitivity in a butterfly gyroscope with a hexagonal oblique beam
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DOI：
10.1063/1.4916587
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发表时间：
2015-04-01
期刊：
影响因子：
1.6
通讯作者：
Wu, Xuezhong
中科院分区：
文献类型：
--
作者：
Xiao, Dingbang;Cao, Shijie;Wu, Xuezhong
开发了一种提高蝶形陀螺仪性能的新方法。该方法通过减小驱动模式和检测模式之间的谐振频率失配，提供了一种提高陀螺仪灵敏度和稳定性的简单途径。这种方法通过模拟和理论分析得到了验证。六边形截面斜梁的尺寸是影响谐振频率失配的主要因素。利用精确的、时间可控的多层预埋掩模制作了一个具有合适尺寸斜梁的原型。将该原型的性能与未调谐的陀螺仪进行了比较。原型的标度因数达到30.13 mV/度/秒，比未调谐陀螺仪得到的值大15倍。原型的偏置稳定性为0.8度/小时，优于未调谐器件的5.2度/小时。（C）2015作者。除另有说明外，所有文章内容均根据知识共享署名3.0未本地化版本许可授权。
A new approach to improve the performance of a butterfly gyroscope is developed. The methodology provides a simple way to improve the gyroscope's sensitivity and stability, by reducing the resonant frequency mismatch between the drive and sense modes. This method was verified by simulations and theoretical analysis. The size of the hexagonal section oblique beam is the major factor that influences the resonant frequency mismatch. A prototype, which has the appropriately sized oblique beam, was fabricated using precise, time-controlled multilayer pre-buried masks. The performance of this prototype was compared with a non-tuned gyroscope. The scale factor of the prototype reaches 30.13 mV/degrees/s, which is 15 times larger than that obtained from the non-tuned gyroscope. The bias stability of the prototype is 0.8 degrees/h, which is better than the 5.2 degrees/h of the non-tuned devices. (C) 2015 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.