Micro bead type temperature sensor with ratiometric fluorescence dyes encapsulated by Parylene
Micro bead type temperature sensor with ratiometric fluorescence dyes encapsulated by Parylene
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DOI：
10.1109/memsys.2011.5734578
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发表时间：
2011-03
期刊：
影响因子：
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通讯作者：
H. Aoki;T. Kan;N. Binh-Khiem;K. Matsumoto;I. Shimoyama
中科院分区：
文献类型：
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作者：
H. Aoki;T. Kan;N. Binh-Khiem;K. Matsumoto;I. Shimoyama
提出了一种基于Parylene封装的荧光染料微球的温度传感器。利用所提出的方法，我们可以制造具有恒定尺寸和染料浓度的封装微珠，这适合于并且优选用于使用荧光强度测量的精确传感。该微珠型传感器可用于难以应用常规方法的微区域。这种类型的传感器也易于使用，不仅可以测量位于目标物体表面上的位置的温度，还可以测量位于其体积内部深处的位置的温度。实验表明，该传感器可以测量微小区域的温度，测量精度为± 0.8 °C ~ ± 3.7 °C。
We propose a sensor for measuring temperature of micro regions with ratiometric fluorescence dye beads encapsulated by Parylene. With the proposed method, we can fabricate encapsulated micro beads with constant size and dye concentration, which is suitable and preferred for precise sensing using fluorescence intensity measurement. This micro bead type sensor can be used for micro regions, which are difficult to apply conventional methods. This type of sensor is also easy to use to measure the temperature of not only positions located on the surface of the target object but also those located deep inside its volume. We demonstrated that this sensor could measure the temperature of micro regions with the accuracy ranging from ± 0.8 °C to ± 3.7 °C.