Fabrication of photonic crystals for the visible spectrum by holographic lithography
Fabrication of photonic crystals for the visible spectrum by holographic lithography
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DOI：
10.1038/35003523
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发表时间：
2000-03-02
期刊：
影响因子：
64.8
通讯作者：
Turberfield, AJ
中科院分区：
文献类型：
--
作者：
Campbell, M;Sharp, DN;Turberfield, AJ
术语“光子学”描述了一种技术，其中数据传输和处理大部分或全部通过光子进行。光子晶体是一种微结构材料，其介电常数在与所需的工作波长相当的长度尺度上周期性地调制。从结构的每个单元散射的波之间的多重干扰可能会打开一个“光子带隙”——一个频率范围，类似于半导体的电子带隙，在这个范围内不存在传播的电磁模式（1-3）。已经确定了许多利用这一特性的装置原理（4-8）。目前，利用传统光刻技术构建二维结构已经取得了相当大的进展(3)，但制造可见光谱的三维光子晶体结构仍然是一个相当大的挑战。在这里，我们描述了一种技术-三维全息光刻-这是非常适合生产三维结构与亚微米的周期性。通过这种技术，我们已经制造出了微周期聚合物结构，我们已经用这些作为模板来制造具有更高折射率对比的互补结构。
The term 'photonics' describes a technology whereby data transmission and processing occurs largely or entirely by means of photons. photonic crystals are microstructured materials in which the dielectric constant is periodically modulated on a length scale comparable to the desired wavelength of operation. Multiple interference between waves scattered fr om each unit cell of the structure may open a 'photonic bandgap'-a range of frequencies, analogous to the electronic bandgap of a semiconductor, within which no propagating electromagnetic modes exist(1-3). Numerous device principles that exploit this property have been identified(4-8). Considerable progress has now been made in constructing two-dimensional structures using conventional lithography(3), but the fabrication of three-dimensional photonic crystal structures for the visible spectrum remains a considerable challenge. Here we describe a technique-three-dimensional holographic lithography-that is well suited to the production of three-dimensional structures with sub-micrometre periodicity. With this technique we have made microperiodic polymeric structures, and we have used these as templates to create complementary structures with higher refractive-index contrast.