Fabrication of polymer microstructures for MEMS: sacrificial layer micromolding and patterned substrate micromolding
Fabrication of polymer microstructures for MEMS: sacrificial layer micromolding and patterned substrate micromolding
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DOI：
10.1007/s10544-007-9094-y
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发表时间：
2007-12-01
影响因子：
2.8
通讯作者：
Hansford, Derek
中科院分区：
文献类型：
--
作者：
Ferrell, Nicholas;Woodard, James;Hansford, Derek
采用两种基于软光刻的制造技术，以聚甲基丙烯酸正丙酯(PPMA)、聚甲基丙烯酸甲酯(PMMA)和聚苯乙烯为原料，制备机械独立、自由悬浮的聚合物微结构。这两种方法都涉及微成型工艺，然后与基材进行热结合。第一种方法，牺牲层微模塑，使用水溶性牺牲层，允许功能结构通过浸入水中释放。第二种方法，图案化基板微模塑，使用通过光刻图案化的永久基板。聚合物MEMS的功能区悬浮在光致抗蚀剂图案中的空隙上。这些工艺已被应用于制造具有各种几何形状的聚合物微结构，以满足特定应用。设备包括微悬臂梁、梁和其他更复杂的微结构。可以想象，热成型工艺适用于从各种热塑性聚合物制造微结构，允许根据应用进行材料选择。
Two soft lithography based fabrication techniques are employed for fabricating mechanically independent, freely suspended polymer microstructure from poly(n-propyl methacrylate) (PPMA), poly(methyl methacrylate) (PMMA), and polystyrene. Both methods involve a micromolding process followed by thermal bonding to the substrate. The first method, sacrificial layer micromolding, uses a water soluble sacrificial layer, allowing functional structures to be released by immersion in water. The second method, patterned substrate micromolding, uses a permanent substrate patterned via photolithography. Functional regions of the polymer MEMS are suspended over the voids in the photoresist pattern. The processes have been applied to the fabrication of polymer microstructures with a variety of geometries for specific applications. Devices have included microcantilevers, beams, and other more complicated microstuctures. The thermal molding process is conceivably applicable to the fabrication of microstructures from a wide variety of thermoplastic polymers, allowing material selection to be tailored based on application.