Y.KATO,et.al: "Multicharged boron ions from pure elements evaporated in a 2.45-GHzECR source" Ion Implantation Technology-96,Elsevier Science B.V.(Proc.XI Int.Conf.on Ion Implantation Technology,June 17-21,1996,in Austin,Texas,USA). (1997)

Y.KATO,et.al: "Multicharged boron ions from pure elements evaporated in a 2.45-GHzECR source" Ion Implantation Technology-96,Elsevier Science B.V.(Proc.XI Int.Conf.on Ion Implantation Technology,June 17-21,1996,in Austin,Texas,USA). (1997)
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Y.KATO 等人:“来自 2.45 GHzECR 源中蒸发的纯元素的多电荷硼离子”离子注入技术-96,Elsevier Science B.V.(Proc.XI Int.Conf.on Ion Implantation Technology,6 月 17-21 日,

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