Inductive bandwidth enhancement of sub-μm InAlAs-InGaAs MSM photodetectors

Inductive bandwidth enhancement of sub-μm InAlAs-InGaAs MSM photodetectors
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DOI:
10.1109/68.376822
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发表时间:
1995-04
影响因子:
2.6
通讯作者:
D. Kuhl;E. H. Bottcher;F. Hieronyani;E. Droge;D. Bimberg
D. Kuhl;E. H. Bottcher;F. Hieronyani;E. Droge;D. Bimberg
中科院分区:
工程技术3区
文献类型:
--
作者:
D. Kuhl;E. H. Bottcher;F. Hieronyani;E. Droge;D. Bimberg

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我们报告了手指间距在 sub-/spl mu/m 范围内的 InGaAs 金属-半导体-金属光电探测器的感应带宽增强。对于优化的电路设计,计算出的频率响应预测 3dB 带宽将提高两倍以上。使用具有 0.7-/spl mu/m 指间距的 InAlAs-InGaAs:Fe MSM 探测器的首次实现产生了 28 GHz 带宽,证明了该方法的可行性。>
We report on the inductive bandwidth enhancement of InGaAs metal-semiconductor-metal photodetectors with finger spacings in the sub-/spl mu/m range. For optimized circuit design, the calculated frequency response predicts an improvement of the 3-dB bandwidth by more than a factor of two. A first implementation using InAlAs-InGaAs:Fe MSM detectors with 0.7-/spl mu/m finger spacing results in a 28-GHz bandwidth demonstrating the feasibility of the approach.>