Mapping graphene layer number at few-micron-scale spatial resolution over large areas using laser scanning
Mapping graphene layer number at few-micron-scale spatial resolution over large areas using laser scanning
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DOI：
10.1088/2053-1583/abcbe7
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发表时间：
2020-11
期刊：
影响因子：
5.5
通讯作者：
A. Carr;Daniel DeGennaro;J. A. Andrade;Alexander Barrett;S. Bhatia;M. Eisaman
中科院分区：
文献类型：
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作者：
A. Carr;Daniel DeGennaro;J. A. Andrade;Alexander Barrett;S. Bhatia;M. Eisaman
在线石墨烯表征以确定透明衬底上的质量、面积覆盖分数和层数对于大规模商业石墨烯生产至关重要。许多应用，包括生物传感器和嵌入式诊断，柔性电子和透明电极，需要从其原生化学气相沉积箔到透明膜的均匀石墨烯转移。为了实现这些器件的大批量生产，石墨烯层数、质量和面积覆盖率必须以高空间分辨率进行映射，以实现生长和转移过程的优化。为此，我们提出了一种空间分辨的光传输技术结合统计分析的测量，以确定不同的透明基板上的石墨烯层数，包括聚合物薄膜和玻璃。该方法可以自动化，并且不需要用户输入阈值。我们的方法可以以10微米的分辨率有效地映射> 1cm 2的区域，并且不受基板类型或厚度的限制，假设基板是透明的。我们证实了这些实验结果与模拟数据，并提出了指导方针，以合理地评估石墨烯的质量，层数，和功能的大小作为实验参数的函数。
In-line graphene characterization to determine quality, area coverage fraction, and layer number on transparent substrates is critical to large-scale commercial graphene production. Many applications, including biosensors and imbedded diagnostics, flexible electronics, and transparent electrodes, require uniform graphene transfer from its native chemical vapor deposition foil to transparent films. To enable high-volume production of these devices, graphene layer number, quality, and area coverage must be mapped at high spatial resolution to enable growth and transfer process optimization. To this end, we present a spatially resolved optical transmission technique combined with statistical analysis of the measurements to determine graphene layer number on different transparent substrates, including polymer films and glass. This method can be automated and does not require user-inputted threshold values. Our method can effectively map >1 cm2 areas at 10 micron resolution and is not limited by type of substrate or thickness assuming the substrate is transparent. We corroborate these experimental results with simulated data and present guidelines to reasonably assess graphene quality, layer number, and feature size as functions of the experimental parameters.