Surface conductivity dependent dynamic behaviour of an ultrafine atmospheric pressure plasma jet for microscale surface processing
Surface conductivity dependent dynamic behaviour of an ultrafine atmospheric pressure plasma jet for microscale surface processing
复制标题
DOI：
10.1016/j.apsusc.2016.08.047
复制
发表时间：
2016-12-30
影响因子：
6.7
通讯作者：
Nagatsu, Masaaki
中科院分区：
文献类型：
--
作者：
Abuzairi, Tomy;Okada, Mitsuru;Nagatsu, Masaaki
本文报道了针尖尺寸为5微米的微毛细常压等离子体射流(APPJ)在不同电导率表面上的动态行为的实验研究。利用高压探头、电流监测器和高速增强型电荷耦合器件摄像机对APPJ的电学特性和时空特性进行了监测。根据这些实验结果，我们提出了一个简单的模型来理解双电极毛细APPJ的放电特性，并估计了射流中电离前沿的速度和电子密度分别为3.5-4.2公里/S和2-7×10(17)m(-3)。通过对不同衬底材料的微毛细管APPJ的动力学分析，发现表面辐照面积强烈依赖于衬底的电导率和介电常数，特别是对于类聚合物衬底，表面辐照面积显著扩大，这可能是由于等离子体射流对聚合物表面积累的电荷的排斥行为所致。研究了在-900V~+900V范围内施加衬底偏压对等离子体辐照到衬底上的影响。从目前的研究结果来看，这对选择微尺度表面修饰的基材是有帮助的。(C)2016爱思唯尔B.V.保留所有权利。
An experimental study on the dynamic behaviour of microcapillary atmospheric pressure plasma jets (APPJs) with 5 mu m tip size for surfaces of different conductivity is reported. Electrical and spatio-temporal characteristics of the APPJs are monitored using high voltage probe, current monitor and high speed intensified charge couple device camera. From these experimental results, we presented a simple model to understand the electrical discharge characteristics of the capillary APPJs with double electrodes, and estimated the velocity of the ionization fronts in the jet and the electron density to be 3.5-4.2 km/s and 2-7 x 10(17) m(-3). By analyzing the dynamics of the microcapillary APPJs for different substrate materials, it was found that the surface irradiation area strongly depended on the substrate conductivity and permittivity, especially in the case of polymer-like substrate, surface irradiation area was significantly broadened probably due to the repelling behaviour of the plasma jets from the accumulated electrical charges on the polymer surface. The effect of applying a substrate bias in the range from -900 V to +900 V on the plasma irradiation onto the substrates was also investigated. From the knowledge of the present results, it is helpful for choosing the substrate materials for microscale surface modification. (C) 2016 Elsevier B.V. All rights reserved.