Fabrication of MoS2(1-x)Te2x via Sulfurization using (t-C4H9)2S2 and its Physical Structure Evaluation
Fabrication of MoS2(1-x)Te2x via Sulfurization using (t-C4H9)2S2 and its Physical Structure Evaluation
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DOI:
10.1109/edtm.2019.8731258
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发表时间:
2019-03
期刊:
影响因子:
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通讯作者:
Y. Hibino;S. Ishihara;Y. Oyanagi;K. Yamazaki;Y. Hashimoto;N. Sawamoto;H. Machida;M. Ishikawa;H. Sudoh;H. Wakabayashi;A. Ogura
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文献类型:
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作者:
Y. Hibino;S. Ishihara;Y. Oyanagi;K. Yamazaki;Y. Hashimoto;N. Sawamoto;H. Machida;M. Ishikawa;H. Sudoh;H. Wakabayashi;A. Ogura
Recently, layered material, especially transition metal dichalcogenides (TMDs) are attracting growing attention due to its unique physical properties and wide possibility in applications. In this study, the fabrication of a TMD alloy, MoS2(1-x)Te2x is discussed and its physical structure is evaluated. It was shown that MoS2(1-x)Te2x can be fabricated with sulfurization of MoSxTey $( x+y \lt 2.0)$ prepared by co-sputtering. Raman spectroscopy and X-ray photoelectron spectroscopy results confirm the formation of the alloy. Further investigation with X-ray diffraction shows that fabrication condition must be carefully selected in order to prevent phase segregation. Fabrication of the alloy is expected to broaden the application of TMD in optoelectronics field.