Manipulation of Liquid Metal Inside an SEM by Taking Advantage of Electromigration
Manipulation of Liquid Metal Inside an SEM by Taking Advantage of Electromigration
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DOI：
10.1109/jmems.2018.2878320
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发表时间：
2019-02-01
影响因子：
2.7
通讯作者：
Fatikow, Sergej
中科院分区：
文献类型：
--
作者：
von Kleist-Retzow, Fabian T.;Haenssler, Olaf C.;Fatikow, Sergej
我们提出了一种新的技术，生产液态金属球与定制的直径使用电迁移。所使用的液态金属是一种多功能材料，越来越多地应用于显微操作应用中。电迁移激活的质量传输的理论与实验结果进行了比较。从理论中获得的知识用于优化该方法。因此，使用恒定电流的不同尖端设计。测量结果被呈现为表征取决于一定电流密度的质量流量。这些结果表明，施加的电流和液态金属的质量流量之间的直接相关性，如理论所假设的。最后，给出了一个成功的贴片应用程序的研究过程。这一应用将在未来简化小规模液态金属的操作和分析。
We present a new technique to produce liquid metal spheres with customized diameters using electromigration. The liquid metal used is a versatile material, which is increasingly implemented in micromanipulation applications. The theories of mass transport activated by electromigration are compared with experimental results. The knowledge gained from the theory is used to optimize this method. Therefore, different tip designs with at constant current are used. The measurement results are presented to characterize the mass flow depending on a certain current density. These results show a direct correlation between the current applied and the mass flow of the liquid metal, as assumed by theory. At the end, a successful pick-and-place application with the investigated process is presented. This application will in future simplify the manipulation and the analysis of liquid metals on the small scale.