Triple Mass Resonator for Electrostatic Quality Factor Tuning
Triple Mass Resonator for Electrostatic Quality Factor Tuning
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用于静电品质因数调谐的三重质量谐振器
DOI：
10.1109/jmems.2021.3138530
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发表时间：
2022
影响因子：
2.7
通讯作者：
Tanaka Shuji
中科院分区：
文献类型：
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作者：
Chen Jianlin;Tsukamoto Takashiro;Tanaka Shuji
在本文中，报道了一种具有独立调谐谐振频率和品质因数（Q 因子）的高性能三质量谐振器（TMR）。在传统的双质量谐振器中设计了附加振荡结构来控制模态形状。理论研究表明，由于模式耦合，外部质量之间的振幅比（主要通过锚损失确定 Q 因子）对悬架和内部弹簧都敏感，而共振频率仅对悬架弹簧敏感。通过这种机制，与锚损耗相关的品质因数可以通过内部弹簧的静电调谐来调节，而谐振频率几乎保持恒定。另一方面，可以通过悬架弹簧的静电调谐来显着调整特征频率。实验结果表明，通过内电极上 15 V 的直流偏压，Q 因子可调节高达 19%，而谐振频率变化仅小至 162 ppm。相比之下，当施加直流偏置来软化悬架刚度时，谐振频率可调谐高达 7023 ppm，Q 因数变化为 16%。 [2021-0167]
In this paper, a triple mass resonator (TMR) with a high capability to independently tune both resonant frequency and quality factor (Q-factor) is reported. An additive oscillating structure is designed into a conventional dual-mass resonator to control the modal shape. The theoretical studies revealed that the amplitude ratio between the outer masses, which mainly determine the Q-factor through the anchor loss, is sensitive to both suspension and inner springs because of mode coupling, while the resonant frequency is only sensitive to the suspension spring. Through this mechanism, the quality factor related to the anchor loss,, can be adjusted by electrostatic tuning of the inner spring, while the resonant frequency keeps almost constant. On the other hand, the eigenfrequency could be significantly tuned by the electrostatic tuning of the suspension spring. The experimental results showed the Q-factor could be tuned as large as 19% by a DC bias of 15 V at the inner electrode, while the resonant frequency change was only as small as 162 ppm. In contrast, when the DC bias was applied to soften the suspension stiffness, the resonant frequency could be tuned as high as 7023 ppm with Q-factor change of 16%. [2021-0167]