Superconducting and structure properties of niobium nitride prepared by rf magnetron sputtering
Superconducting and structure properties of niobium nitride prepared by rf magnetron sputtering
复制标题
射频磁控溅射制备氮化铌的超导及结构性能
DOI：
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发表时间：
1985
期刊：
影响因子：
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通讯作者：
S. Qadri
中科院分区：
文献类型：
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作者：
E. Cukauskas;W. Carter;S. Qadri
研究了射频磁控溅射NbN的衬底温度在200~750℃范围内随Ar-N_2溅射气体中甲烷分压的变化规律。在溅射气体中加入约2%的甲烷，在较高的衬底温度下制备出了最好的薄膜。这些薄膜的电阻率也约为70μΩ cm。在较低的衬底温度下，T∼为2 0 0°C时，获得的最佳T_c约为13.3K，电阻率为14 0μΩ cm。用X射线衍射仪和读出的X射线照片研究了这些材料的晶体结构。未加甲烷的薄膜为δ和eNbN两相结构。加入少量甲烷生成单一的(2 0 0)择优取向的δ相NbN。结果表明，随着甲烷加入量的增加，δ的晶格常数在4.39A~4.45A之间变化。掺氢对NbN的影响是形成多相的NbN。
The properties of rf‐magnetron‐sputtered NbN have been investigated for substrate temperatures from 200°C to 750°C as a function of the partial pressure of methane introduced into the Ar–N2 sputtering gas mixture. The best films were prepared at elevated substrate temperatures with approximately 2% methane added to the sputter gas. These films also had resistivities approximately 70 μΩ cm. At lower substrate temperature, T∼200°C, the best attained Tc was approximately 13.3 K with a resistivity of 140 μΩ cm. The crystal structure of these materials was investigated using x‐ray diffraction and Read x‐ray photographs. Those films prepared with no added methane were found to be two‐phase δ and e NbN. The addition of a small amount of methane produced single δ phase NbN with a predominant (200) preferrential orientation. The δ phase lattice parameter was determined to vary approximately from 4.39 A to 4.45 A as the amount of methane was increased. The effect of hydrogen doping on NbN was to produce multiphase ...