Arrays of Microplasma Jets Generated by Double Parabolic Microcavities in an Hourglass Configuration
Arrays of Microplasma Jets Generated by Double Parabolic Microcavities in an Hourglass Configuration
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沙漏结构中双抛物面微腔产生的微等离子体射流阵列
DOI：
10.1109/tps.2011.2165856
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发表时间：
2011
影响因子：
1.5
通讯作者：
J. Eden
中科院分区：
文献类型：
--
作者：
J. Cho;M. Kim;S. Park;J. Eden
在直径为300 μm的喉道呈沙漏状的双抛物型微腔中产生了微等离子体射流。采用微粉爆破方法将生长在铝箔上的纳米多孔氧化铝制备成背对背的抛物型空腔，并以流量为1.5-6标准L/min的原料气进行操作。已经演示了6 × 6射流阵列，其射流间距和填充系数分别为1.25 mm和17%。He微等离子体射流在实验室空气中膨胀产生的可见荧光图像提供了He（23S）→N2+ Penning电离反应区范围的生动图像。
Microplasma jets have been generated in double parabolic microcavities arranged in an hourglass structure with a 300-μm-diameter throat. Fabricated by micropowder blasting of nanoporous alumina grown on Al foil, the parabolic cavities are situated back-to-back and operated with a feedstock gas having a flow rate of ~ 1.5-6 standard L/min. Arrays as large as 6 × 6 jets have been demonstrated for which the jet pitch and fill factor are 1.25 mm and 17%, respectively. Images of the visible fluorescence produced by the expansion of He microplasma jets in laboratory air provide a vivid picture of the extent of the He(23S) → N2+ Penning ionization reaction zone.