Modeling of metastable phase formation for sputtered Ti1-xAlxN thin films
Modeling of metastable phase formation for sputtered Ti1-xAlxN thin films
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溅射 Ti1-xAlxN 薄膜亚稳态相形成的建模
DOI：
10.1016/j.actamat.2018.12.004
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发表时间：
2019-02-15
期刊：
影响因子：
9.4
通讯作者：
Schneider, Jochen M.
中科院分区：
文献类型：
--
作者：
Liu, Sida;Chang, Keke;Schneider, Jochen M.
亚稳态氮化钛铝涂层广泛应用于切削和成形领域。虽然人们普遍认为亚稳TiAlN的相形成受动力学因素的影响，但今天的建模尝试仅基于能量学。在这项工作中，亚稳相TiAlN的形成预测的基础上组合磁控溅射实验，表面扩散的激活能，临界扩散距离，以及热力学计算。从进一步的组合生长实验不同的化学成分，沉积温度，和沉积速率的相形成的数据与模型吻合得很好。此外，它表明，预测的临界溶解度范围的显着扩展是通过考虑动力学因素。明确考虑动力学扩展铝的溶解度限制到较低的值，以前无法获得的能量，但实验。(C)2018 Acta Materialia Inc.由爱思唯尔有限公司出版。保留所有权利。
Metastable titanium aluminum nitride coatings are widely applied in cutting and forming applications. Although it is generally accepted that the phase formation of metastable TiAIN is governed by kinetic factors, modeling attempts today are based solely on energetics. In this work, the metastable phase formation of TiAIN is predicted based on one combinatorial magnetron sputtering experiment, the activation energy for surface diffusion, the critical diffusion distance, as well as thermodynamic calculations. The phase formation data obtained from further combinatorial growth experiments varying chemical composition, deposition temperature, and deposition rate are in good agreement with the model. Furthermore, it is demonstrated that a significant extension of the predicted critical solubility range is enabled by taking kinetic factors into account. Explicit consideration of kinetics extends the Al solubility limit to lower values, previously unobtainable by energetics, but accessible experimentally. (C) 2018 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.