Stacking of over 150 layers of InAs quantum dots on InP(311)B substrates

Stacking of over 150 layers of InAs quantum dots on InP(311)B substrates
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在 InP(311)B 衬底上堆叠超过 150 层 InAs 量子点

DOI:
10.1109/iciprm.2004.1442617
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发表时间:
2004
期刊:
16th IPRM. 2004 International Conference on Indium Phosphide and Related Materials, 2004.
影响因子:
--
通讯作者:
N. Ohtani
N. Ohtani
中科院分区:
--
文献类型:
--
作者:
K. Akahane;N. Yamamoto;S. Gozu;N. Ohtani

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我们使用新型应变控制技术在 InP(311)B 衬底上制造了 InAs 量子点 (QD) 堆叠,并通过精确控制应变补偿间隔层的成分来提高其尺寸均匀性。因此,我们实现了 150 层 InAs QD 堆叠,其中 QD 的密度超过 5 /spl times/ 10/sup 12//cm/sup 2/,这是使用传统的 QD 制造技术无法获得的。在 150 层堆叠的样品中,量子点表现出良好的尺寸均匀性和有序结构。此外,在室温下该样品观察到强烈的1.5 /spl mu/m光致发光发射,这表明它适用于光纤通信系统。
We fabricated stacks of InAs quantum dots (QDs) on InP(311)B substrates using a novel strain-controlled technique, and improved their size uniformity by precisely controlling the composition of the strain-compensating spacer layers. Consequently, we achieved a 150-layer stack of InAs QDs in which the density of the QDs exceeded 5 /spl times/ 10/sup 12//cm/sup 2/ which cannot be obtained using conventional techniques for fabricating QDs. In a sample of a 150-layer stack, the QDs showed good size uniformity and an ordered structure. In addition, a strong 1.5 /spl mu/m photoluminescence emission was observed in this sample at room temperature, which indicates that it would be suitable for fiber-optic communication systems.
DOI: 10.1063/1.92959
发表时间: 1982-01-01
影响因子: 4
作者:
ARAKAWA, Y;SAKAKI, H
通讯作者: SAKAKI, H