Mimicking Electrodeposition in the Gas Phase: A Programmable Concept for Selected-Area Fabrication of Multimaterial Nanostructures
Mimicking Electrodeposition in the Gas Phase: A Programmable Concept for Selected-Area Fabrication of Multimaterial Nanostructures
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DOI：
10.1002/smll.200901547
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发表时间：
2010-05-21
期刊：
影响因子：
13.3
通讯作者：
Jacobs, Heiko O.
中科院分区：
文献类型：
--
作者：
Cole, Jesse J.;Lin, En-Chiang;Jacobs, Heiko O.
一种原位气相工艺，产生带电流的Au，Si，TiO 2，ZnO和Ge纳米粒子/簇一起报道了一个可编程的概念，选择区域组装/印刷的一种以上的材料类型。气相过程模拟溶液电沉积，其中液相中的离子被气相中的带电团簇取代。的压力范围中，类比适用的讨论，它表明，颗粒可以被镀入孔垂直（最小分辨率60 nm）或横向形成低电阻率（48 μ Ω cm）互连。该方法被应用于多材料纳米颗粒薄膜和传感器的形成。该系统在大气压下工作，并在室温下将材料沉积到电偏置的衬底区域上。无泵操作和并行无摩擦沉积的组合为可印刷柔性电子产品提供了可扩展的工具，并具有混合和匹配材料的能力。
An in situ gas-phase process that produces charged streams of Au, Si, TiO2, ZnO, and Ge nanoparticles/clusters is reported together with a programmable concept for selected-area assembly/printing of more than one material type. The gas-phase process mimics solution electrodeposition whereby ions in the liquid phase are replaced with charged clusters in the gas phase. The pressure range in which the analogy applies is discussed and it is demonstrated that particles can be plated into pores vertically (minimum resolution 60 nm) or laterally to form low-resistivity (48 mu Omega cm) interconnects. The process is applied to the formation of multimaterial nanoparticle films and sensors. The system works at atmospheric pressure and deposits material at room temperature onto electrically biased substrate regions. The combination of pumpless operation and parallel nozzle-free deposition provides a scalable tool for printable flexible electronics and the capability to mix and match materials.