Characterization of energy trapping in a bulk acoustic wave resonator
Characterization of energy trapping in a bulk acoustic wave resonator
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DOI：
10.1063/1.3521263
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发表时间：
2010-12-06
影响因子：
4
通讯作者：
Kaivola, Matti
中科院分区：
文献类型：
--
作者：
Kokkonen, Kimmo;Meltaus, Johanna;Kaivola, Matti
使用外差激光干涉仪测量固定安装的 1.8 GHz 体声波谐振器的有源电极区域内及其周围区域的声波场。从测量数据中提取两个区域的板波色散图。实验色散数据揭示了谐振器周围区域中声振动模式的截止频率，因此可以容易地确定谐振器的能量捕获范围。测量到的周围区域的色散特性以及谐振器中色散曲线的幅度突然减小，表明谐振器开始出现声泄漏。该信息对于验证和进一步开发用于谐振器设计的仿真工具非常重要。讨论了实验波场图像、两个区域的色散图以及能量泄漏的阈值。 (C) 2010 年美国物理研究所。 [doi:10.1063/1.3521263]
Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it in the surrounding region, are measured using a heterodyne laser interferometer. Plate-wave dispersion diagrams for both regions are extracted from the measurement data. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and, therefore, the energy trapping range of the resonator can readily be determined. The measured dispersion properties of the surrounding region, together with the abruptly diminishing amplitude of the dispersion curves in the resonator, signal the onset of acoustic leakage from the resonator. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed. (C) 2010 American Institute of Physics. [doi:10.1063/1.3521263]