Experimental investigations on super-smooth polishing of strontium titanate based ceramics substrates

Experimental investigations on super-smooth polishing of strontium titanate based ceramics substrates
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钛酸锶基陶瓷基体超光滑抛光实验研究

DOI:
10.1504/ijat.2017.10007959
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发表时间:
2017-09
影响因子:
--
通讯作者:
Jisheng Pan
Jisheng Pan
中科院分区:
--
文献类型:
--
作者:
Qiusheng Yan;Xiaobei Cao;Jisheng Pan

文献摘要

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钛酸锶(SrTiO 3)是一种新型的多功能电子陶瓷材料。采用无压烧结法制备了具有高介电常数的SrTiO_3陶瓷基片,
Strontium titanate (SrTiO3) is a new type of multi-function electronic ceramic material. SrTiO3 ceramic substrates with a high dielectric constant can be obtained by non-pressurised sintering using ultrathin blanks, which result in the characteristics of