Numerical modeling and analysis of plasmonic flying head for rotary near-field lithography technology
Numerical modeling and analysis of plasmonic flying head for rotary near-field lithography technology
复制标题
旋转近场光刻技术等离子体飞头的数值模拟与分析
DOI：
10.1007/s40544-017-0189-z
复制
发表时间：
2018-12-01
期刊：
影响因子：
6.8
通讯作者：
Meng, Yonggang
中科院分区：
文献类型：
--
作者：
Hu, Yueqiang;Meng, Yonggang
旋转近场光刻（RNFL）技术为纳米制造提供了一条以高产量和低成本克服衍射极限的途径。利用等离子体头被动飞行的优势，RNFL可以在几十纳米处实现10 m/s的处理速度和完美的近场条件。等离子体飞行头的飞行性能是该系统的关键问题。线宽与近场带隙有很强的相关性，而动态性能直接影响着制造均匀性。更严重的问题是PFH和基板之间的意外接触将导致系统故障。因此，在系统级对PFH的飞行过程进行建模和分析具有重要意义。在这项研究中，一个新的全耦合悬浮PFH空气基板（SPAS）模型，集成了六个自由度悬浮PFH动力学，PFH空气基板空气轴承润滑，和基板振动，建立。空气轴承的压力分布取决于分子气体润滑方程，该方程通过有限元法（FEM）使用COMSOL Multiphysics软件使用基于局部压力梯度的自适应网格细化算法来求解。在此基础上，选取了三种不同的空气轴承表面设计方案，对其静态、动态和加载/卸载性能进行了研究，以验证其是否满足RNFL的设计要求。最后，基于该模型开发了PFH分析求解器SKLY.app。
Rotary near-field lithography (RNFL) technology provides a route to overcome the diffraction limit with a high throughput and low cost for nanomanufacturing. Utilizing the advantage of the passive flying of a plasmonic head, RNFL can achieve a 10 m/s processing speed with a perfect near-field condition at dozens of nanometers. The flying performance of the plasmonic flying head (PFH) is the pivotal issue in the system. The linewidth has a strong correlation with the near-field gap, and the manufacturing uniformity is directly influenced by the dynamic performance. A more serious issue is that the unexpected contact between the PFH and substrate will result in system failure. Therefore, it is important to model and analyze the flying process of the PFH at the system level. In this study, a novel full-coupled suspension-PFH-air-substrate (SPAS) model that integrates a six-degree of freedom suspension-PFH dynamics, PFH-air-substrate air bearing lubrication, and substrate vibration, is established. The pressure distribution of the air bearing is governed by the molecular gas lubrication equation that is solved by the finite element method (FEM) with a local pressure gradient based adaptive mesh refinement algorithm using the COMSOL Multiphysics software. Based on this model, three designs of the air bearing surface are chosen to study the static, dynamic, and load/unload performance to verify whether it satisfies the design requirements of RNFL. Finally, a PFH analysis solver SKLY.app is developed based on the proposed model.