Atomic scale investigation of chemical heterogeneity in β-(AlxGa1−x)2O3 films using atom probe tomography
Atomic scale investigation of chemical heterogeneity in β-(AlxGa1−x)2O3 films using atom probe tomography
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使用原子探针断层扫描对 β-(AlxGa1−x)2O3 薄膜中的化学异质性进行原子尺度研究
DOI：
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发表时间：
2019
影响因子：
4
通讯作者：
Jinwoo Hwang
中科院分区：
文献类型：
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作者：
B. Mazumder;Jith Sarker;Yuewei Zhang;Jared M. Johnson;Menglin Zhu;S. Rajan;Jinwoo Hwang
利用原子探针层析技术研究了不同Al浓度的β-（AlxGa 1 −x）2 O3薄膜中原子尺度的化学不均匀性。两个薄膜样品的Al摩尔浓度为x = 0.2和x = 0.5，生长的等离子体辅助分子束外延，进行了分析和比较。在这两种情况下，测得的总组合物被认为是与目标组合物一致。采用原子探针层析技术研究了不同Al含量的β-（AlxGa 1 −x）2 O3薄膜在原子尺度上的化学不均匀性。两个薄膜样品的Al摩尔浓度为x = 0.2和x = 0.5，生长的等离子体辅助分子束外延，进行了分析和比较。在这两种情况下，测得的总组合物被认为是与目标组合物一致。具有较高Al含量的膜显示出显著的化学不均匀性，这可以归因于较低的生长温度。
We investigated atomic scale chemical heterogeneity in β-(AlxGa1−x)2O3 thin films with different aluminum (Al) concentrations using atom probe tomography. Two film samples with an Al molar concentration of x = 0.2 and x = 0.5, grown by plasma assisted molecular beam epitaxy, were analyzed and compared. The measured overall compositions were found to be in agreement with the target compositions in both cases. The film with the higher Al content showed a significant chemical heterogeneity, which could be attributed to the low growth temperature.We investigated atomic scale chemical heterogeneity in β-(AlxGa1−x)2O3 thin films with different aluminum (Al) concentrations using atom probe tomography. Two film samples with an Al molar concentration of x = 0.2 and x = 0.5, grown by plasma assisted molecular beam epitaxy, were analyzed and compared. The measured overall compositions were found to be in agreement with the target compositions in both cases. The film with the higher Al content showed a significant chemical heterogeneity, which could be attributed to the low growth temperature.
影响因子：
2.2
作者：
Gault, B.;Haley, D.;Geiser, B. P.
通讯作者：
Geiser, B. P.