Improved Compositional Uniformity of lnGaAsP Grown by Low Pressure Metal Organic Vapor Phase Epitaxy Using Tertiary Butyl Phosphine as the Phosphorus Source
Improved Compositional Uniformity of lnGaAsP Grown by Low Pressure Metal Organic Vapor Phase Epitaxy Using Tertiary Butyl Phosphine as the Phosphorus Source
复制标题
以叔丁基膦为磷源低压有机金属气相外延生长 lnGaAsP 的成分均匀性得到改善
DOI:
10.1016/0022-0248(92)90446-p
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发表时间:
1992
期刊:
影响因子:
--
通讯作者:
K. Trapp
中科院分区:
文献类型:
--
作者:
J. Zilko;P. S. Davisson;L. Luther;K. Trapp