Stress-induced anisotropic diffusion of component elements in the stacked thin-film multi-layer structures
Stress-induced anisotropic diffusion of component elements in the stacked thin-film multi-layer structures
复制标题
堆叠薄膜多层结构中组成元素的应力诱导各向异性扩散
DOI:
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发表时间:
2011
期刊:
影响因子:
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通讯作者:
and Hideo Miura
中科院分区:
文献类型:
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作者:
Tomohiro Sano;Naokazu Murata;Ken Suzuki;and Hideo Miura