A high-resolution microchip optomechanical accelerometer
A high-resolution microchip optomechanical accelerometer
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DOI：
10.1038/nphoton.2012.245
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发表时间：
2012-11-01
期刊：
影响因子：
35
通讯作者：
Painter, Oskar
中科院分区：
文献类型：
--
作者：
Krause, Alexander G.;Winger, Martin;Painter, Oskar
加速度监测对于从惯性导航到消费电子产品等各种应用至关重要(1,2)。典型的加速度计操作涉及灵活安装的测试质量的灵敏位移测量，这可以使用电容（3,4）、压电（5）、隧道电流（6,7）或光学（8-11）方法来实现。尽管光学检测提供了卓越的位移分辨率(8)、抗电磁干扰能力和远距离读出(7)，但当前的光学加速度计要么不允许芯片级集成，要么使用相对笨重的低带宽测试质量传感器(8-10)。在这里，我们演示了一种光机械加速度计，该加速度计利用光子晶体纳米腔 (12) 与高机械 Q 因子 (13) 的纳米束缚测试质量单片集成来实现超灵敏位移读数。该器件可实现 10 μg Hz(-1/2) 的加速度分辨率、亚毫瓦光功率、大于 20 kHz 的带宽和大于 40 dB 的动态范围。此外，这里使用的纳克测试质量允许强大的光机械反作用（14-17），为新型运动传感器奠定了基础。
The monitoring of acceleration is essential for a variety of applications ranging from inertial navigation to consumer electronics(1,2). Typical accelerometer operation involves the sensitive displacement measurement of a flexibly mounted test mass, which can be realized using capacitive(3,4), piezoelectric(5), tunnel-current(6,7) or optical(8-11) methods. Although optical detection provides superior displacement resolution(8), resilience to electromagnetic interference and long-range readout(7), current optical accelerometers either do not allow for chip-scale integration or utilize relatively bulky test mass sensors of low bandwidth(8-10). Here, we demonstrate an optomechanical accelerometer that makes use of ultrasensitive displacement readout using a photonic-crystal nanocavity(12) monolithically integrated with a nanotethered test mass of high mechanical Q-factor(13). This device achieves an acceleration resolution of 10 mu g Hz(-1/2) with submilliwatt optical power, bandwidth greater than 20 kHz and a dynamic range of greater than 40 dB. Moreover, the nanogram test masses used here allow for strong optomechanical backaction(14-17), setting the stage for a new class of motional sensors.