Similarity evaluation of 3D topological measurement results using statistical methods

Similarity evaluation of 3D topological measurement results using statistical methods
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使用统计方法评估3D拓扑测量结果的相似性

DOI:
10.1117/12.2557627
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发表时间:
2020
期刊:
Dimensional Optical Metrology and Inspection for Practical Applications IX
影响因子:
--
通讯作者:
Li, Beiwen
Li, Beiwen
中科院分区:
--
文献类型:
--
作者:
Suresh, Vignesh;Zheng, Yi;Zhang, Xiao;Wang, Shaodong;Qin, Hantang;Li, Qing;Li, Beiwen

文献摘要

相似文献

从不同的光学计量技术获得的三维(3D)拓扑数据往往会产生局部不一致,这可能会导致检查员做出错误的判断,特别是在精密计量的情况下。本研究探讨了统计方法,以提供一个功能评分的相似性。调查使用两种统计方法(Pearson相关系数和图像距离),两种光学技术(结构光和聚焦变化显微镜)和两种应用场景(金属添加剂打印和弹道法医检查)进行。实验结果表明,即使从不同的光学技术获得的3D拓扑数据,使用统计工具,以协助匹配/不匹配的二进制决策的承诺。
Three dimensional (3D) topology data obtained from different optical metrology techniques tend to produce local disagreements which may yield incorrect judgement from inspectors especially under scenarios of precision metrology. This research explores statistical methods to provide a functional scoring for similarities. The investigation is conducted using two statistical methods (Pearsons correlation coefficient and image distance), two optical techniques (structured light and focus variation microscopy) and two application scenarios (metal additive printing and ballistic forensic examination). Experimental results show the promise of using statistical tools to assist binary decisions for matching/non-matching even if 3D topology data are obtained from different optical techniques.