Absolute UV and VUV emission in the 110–400 nm region from 13.56 MHz driven hollow slot microplasmas operating in open air
Absolute UV and VUV emission in the 110–400 nm region from 13.56 MHz driven hollow slot microplasmas operating in open air
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DOI：
10.1088/0963-0252/13/3/021
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发表时间：
2004-08
影响因子：
3.8
通讯作者：
A. Rahman;A. Yalin;V. Surla;O. Stan;K. Hoshimiya;Zengqi Yu;E. Littlefield;G. Collins
中科院分区：
文献类型：
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作者：
A. Rahman;A. Yalin;V. Surla;O. Stan;K. Hoshimiya;Zengqi Yu;E. Littlefield;G. Collins
我们展示了在大气压下露天运行的射频驱动 (13.56 MHz) 空心槽微等离子体在 110–400 nm 区域的绝对光发射光谱。我们研究中的术语“微等离子体”仅指电极间分离（100-600 µm），因为电极长度可从 1 厘米扩展到 30 厘米。这产生了延伸的狭缝等离子体和相关的余辉羽流，如本文所述。给出了流经微电极的氩气和氦气与氢气和氮气的少量混合物进入露天的气体流的光谱。光谱根据物种起源和主要发射线的大小进行讨论。原子 O 和 N 谱线在 110-200 nm 区域占主导地位，而在 200-400 nm 区域，NO、N2 和 NH 分子谱线最强。讨论了状态在露天微等离子体中的作用，并使用第二个分子氮正系统 (N2(C 3Πg–B 3Πg)) 来测量旋转（气体）温度。最后，我们将露天微等离子体的光发射效率和强度与 UVB 和 UVC 区域的商用密封汞灯可达到的值进行比较。
We present absolute optical emission spectra in the 110–400 nm regions from radio-frequency-driven (13.56 MHz) hollow slot microplasmas operating in open air at atmospheric pressure. The term microplasma in our research refers to inter-electrode separation (100–600 µm) only, as electrode lengths are scalable from 1 to 30 cm. This creates an extended slot plasma and an associated afterglow plume as described herein. Spectra are presented for gas flows through the microelectrodes of argon and helium with small admixtures of hydrogen and nitrogen into open air. The spectra are discussed in terms of species origin and magnitude of the dominant emission lines. Atomic O and N lines dominate the 110–200 nm region, whereas, in the 200–400 nm region, NO, N2, and NH molecular lines are strongest. The role of the state in the open air microplasmas is discussed and the second positive system of molecular nitrogen (N2(C 3Πg–B 3Πg)), is used to measure the rotational (gas) temperature. Finally, we compare the efficiency and magnitude of light emission from the open air microplasmas with values attainable from commercial sealed mercury lamps in the UVB and UVC regions.