Stable microplasmas in air generated with a silicon inverted pyramid plasma cathode
Stable microplasmas in air generated with a silicon inverted pyramid plasma cathode
复制标题
使用硅倒金字塔等离子体阴极在空气中产生稳定的微等离子体
DOI：
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发表时间：
2005
影响因子：
1.5
通讯作者：
J. Eden
中科院分区：
文献类型：
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作者：
S. Park;J. Eden
稳定的微放电，/spl sim/0.5-1毫米的长度，产生在大气中的空气中提取等离子体从（50 /spl μ/m）/sup 2/倒置金字塔硅微放电装置，作为等离子体阴极。金属和电介质尖端都已成功地作为提取电极进行了测试，并证明了高达20 kHz的驱动频率。所产生的等离子体柱或导管表现良好并且基本上是圆柱形的，其直径小于Si阴极装置的宽度。
Stable microdischarges, /spl sim/0.5-1 mm in length, are produced in atmospheric air by extracting plasma from a (50 /spl mu/m)/sup 2/ inverted pyramidal Si microdischarge device which serves as a plasma cathode. Both metal and dielectric tips have been successfully tested as the extraction electrode and driving frequencies up to 20 kHz have been demonstrated. The plasma column, or conduit, generated is well behaved and essentially cylindrical with a diameter smaller than the width of the Si cathode device.