High-precision machining by measurement and compensation of motion error
High-precision machining by measurement and compensation of motion error
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DOI：
10.1016/j.ijmachtools.2008.02.005
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发表时间：
2008-08-01
影响因子：
14
通讯作者：
Fujita, Tomoya
中科院分区：
文献类型：
--
作者：
Kono, Daisuke;Matsubara, Atsushi;Fujita, Tomoya
本文介绍了一种机床几何误差建模与补偿的系统方法。为了将几何误差与其他误差区分开来，利用傅里叶级数对测量误差进行了频域分析。然后，基于其波长的重复性来选择对应于几何误差的频率分量。最后，通过精密运动驱动对零件进行重构和转发以进行补偿。为补偿XY平面Z向误差分量，研制了Z轴精动机构的数控机床。以非回转刀具加工平面为例，验证了该方法的有效性。在45 mm×70 mm的平面上，相对位移的波动从1.3减小到0.5微米P-V。用单晶金刚石刀具进行了加工实验，轮廓曲线的直线度从1.0降低到0.4微米，实验结果表明，几何误差与机床立柱弯曲模式引起的振动是分开补偿的。(C)2008爱思唯尔有限公司。保留所有权利。
This paper describes a systematic method to model and compensate geometric errors of machine tools. In order to separate geometric errors from other errors, measured errors are analyzed in the frequency domain by using the Fourier series. Then, the frequency components corresponding to geometric errors are selected based on the repeatability of their wavelength. Finally, the components are reconstructed and forwarded for the compensation by a fine motion drive. A CNC machine tool with a fine motion mechanism oil the Z-axis was developed to compensate the error components in the Z direction oil the XY plane. A flat surface machining with non-rotational cutting tools was tested to validate our approach. On the plane of 45 mm x 70 mm, the fluctuation of the relative displacement was reduced from 1.3 to 0.5 mu m P-V. Machining experiments with a single-crystal diamond tool were also carried out and the straightness of the profile curve was reduced from 1.0 to 0.4 mu m. The result of the experiments showed that the geometric errors were compensated separately from the vibration due to the bending mode of the machine column. (c) 2008 Elsevier Ltd. All rights reserved.