Rib profile effects on scattering in semiconductor optical waveguides
Rib profile effects on scattering in semiconductor optical waveguides
复制标题
肋轮廓对半导体光波导散射的影响
DOI：
10.1063/1.99972
复制
发表时间：
1988
期刊：
影响因子：
--
通讯作者：
E. Kapon
中科院分区：
文献类型：
--
作者：
R. Deri;R. Hawkins;E. Kapon
低损耗半导体波导元件对于导波光学元件与其他光电器件的集成至关重要。与制造相关的散射损耗和弯曲辐射损耗之间的权衡将决定半导体集成光学器件的实用最小尺寸。紧凑弯曲需要具有严格光学限制（小模式尺寸、大折射率差）的肋形波导，但更容易受到制造引起的粗糙表面散射损耗的影响。了解肋条几何形状如何影响散射将为优化导向性能提供有价值的工具。尽管一维平面导轨中的散射已在理论上得到了广泛研究，1,2 二维肋导轨的完整模型尚不可用。
Low-loss semiconductor waveguide components are essential for integrating guided-wave optical components with other optoelectronic devices. Trade-offs between fabrication-related scattering loss and bend radiation loss will determine the smallest size practical for semiconductor integrated-optic devices. Rib waveguides with tight optical confinement (small mode size, large index differences) are required for compact bends but are more susceptible to fabrication-induced scattering loss from rough surfaces. An understanding of how rib geometry affects scattering would provide a valuable tool to optimize guide performance. Although scattering in 1-D planar guides has been extensively investigated theoretically,1,2 a complete model for 2-D rib guides is not available.