High-speed MEMS-based gas chromatography
High-speed MEMS-based gas chromatography
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DOI：
10.1109/jmems.2006.879708
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发表时间：
2006-10-01
影响因子：
2.7
通讯作者：
Wise, Kensall
中科院分区：
文献类型：
--
作者：
Agah, Masoud;Lambertus, Gordon Randall;Wise, Kensall
本文报道了用于高速微气相色谱（p，G）系统的微晶硅玻璃分离柱。微制造柱集成了电阻加热器和温度传感器和电容压力传感器，以允许温度和压力编程和流量控制，并在mu GC系统中实现可重复分离。这些柱子长25厘米，宽150亩，深250亩，采用玻璃上硅溶解晶圆工艺，在1.2厘米见方的模具上制成。编程温度为10摄氏度/秒，低质量柱分离11组分的气体混合物，在不到10秒，包括烷烃从C-5到C-16和模拟的C-4， TNT，沙林，和芥子气。当用于阵列架构时，这些MEMS列应该允许高速分析而不牺牲分离效率。
This paper reports microfabricated silicon-glass separation columns for high-speed micro gas chromatography (p,G G) systems. The microfabricated columns are integrated with resistive heaters and temperatures sensors and capacitive pressure sensors to allow temperature and pressure programming and flow control and to achieve reproducible separations in a mu GC system. These 25-cm-long, 150-mu m-wide, and 250-mu m-deep columns are fabricated on a 1.2-cm square die using a silicon-on-glass dissolved wafer process. Programmed with temperature ramps of 10 degrees C/s, the low-mass columns separate eleven-component gaseous mixtures in less than 10 s, including alkanes from C-5 to C-16 and simulants for C-4, TNT, sarin, and mustard gas. When used in arrayed architectures, these MEMS columns should allow high-speed analysis without sacrificing separation efficiency.