Phase-sensitive absolute-amplitude measurements of surface waves using heterodyne interferometry
Phase-sensitive absolute-amplitude measurements of surface waves using heterodyne interferometry
复制标题
使用外差干涉法对表面波进行相敏绝对振幅测量
DOI：
10.1109/ultsym.2003.1293103
复制
发表时间：
2003
期刊：
影响因子：
--
通讯作者：
M. Salomaa
中科院分区：
文献类型：
--
作者：
K. Kokkonen;J. Knuuttila;Victor Plessky;M. Salomaa
用外差干涉法测量表面波的相敏绝对振幅。我们描述了一种新的外差干涉仪扫描表面声波在高频率，高达6 GHz。外差操作便于测量表面波的绝对振幅而无需校准。同时，它还可以测量相位。振幅和相位信息允许表面声波的精确表征。此外，波动可以以动画的形式可视化以获得洞察力。通过测量167 MHz SPUDT器件和374 MHz扇形SAW滤波器对干涉仪进行了测试。
Phase-sensitive absolute-amplitude measurements of surface waves using heterodyne interferometry. We describe a novel heterodyne interferometer for scanning surface-acoustic waves at high frequencies, up to 6 GHz. The heterodyne operation facilitates the measurement of the absolute amplitude of the surface waves without calibration. It simultaneously also enables measuring the phase. The amplitude and phase information allows a precise characterization of the surface acoustic waves. Moreover, the wave motion can be visualized in the form of animations to gain insight. The interferometer has been tested by measuring a 167 MHz SPUDT device and a 374 MHz fan-shaped SAW filter.