Thermochemical nanopatterning of organic semiconductors
Thermochemical nanopatterning of organic semiconductors
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DOI：
10.1038/nnano.2009.254
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发表时间：
2009-10-01
影响因子：
38.3
通讯作者：
Cacialli, Franco
中科院分区：
文献类型：
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作者：
Fenwick, Oliver;Bozec, Laurent;Cacialli, Franco
半导体聚合物在表面上的图案化对于纳米电子学和纳米光子学中的各种应用是重要的。然而，许多用于图案化无机材料的纳米光刻方法对于有机半导体来说过于苛刻，因此研究集中在光学图案化（1-3）和各种软光刻（4）上。令人惊讶的是，很少有人关注热（5），热化学和热化学（8-13）图案化。在这里，我们展示了热化学纳米图案化的聚（对苯乙炔），一种广泛使用的电致发光聚合物。(14)通过扫描探针。我们生产的图案化结构的尺寸低于28纳米，虽然探针的尖端具有5 μ m的直径，并实现100 μ m s（-1）的写入速度。实验表明，28 nm的分辨率是可能的，当尖端-样品接触区域具有类似于100 nm的尺寸时，并且基于有限元建模，我们预测通过使用更薄的抗蚀剂层和优化的探针可以提高分辨率。热化学光刻提供了一种通用的、可靠的和通用的纳米图案化技术，因为大量的光学材料，包括许多商业交联剂添加剂和光致抗蚀剂，依赖于也可以被热活化的化学机制（8，15，16）。
Patterning of semiconducting polymers on surfaces is important for various applications in nanoelectronics and nanophotonics. However, many of the approaches to nanolithography that are used to pattern inorganic materials are too harsh for organic semiconductors, so research has focused on optical patterning(1-3) and various soft lithographies(4). Surprisingly little attention has been paid to thermal(5), thermornecharl and thermochemical(8-13) patterning. Here, we demonstrate thermochemical nanopatterning of poly(p-phenylene vinylene), a widely used electroluminescent polymer.(14), by a scanning probe. We produce patterned structures with dimensions below 28 nm, although the tip of the probe has a diameter of 5 mu m, and achieve write speeds of 100 mu m s(-1). Experiments show that a resolution of 28 nm is possible when the tip-sample contact region has dimensions of similar to 100 nm and, on the basis of finite-element modelling we predict that the resolution could be improved by using a thinner resist layer and an optimized probe. Thermochemical lithography offers a versatile, reliable and general nanopatterning technique because a large number of optical materials, including many commercial crosslinker additives and photoresists, rely on chemical mechanisms that can also be thermally adivated(8,15,16).